Just to wire everything right. Can you explain where is EN - Duet Heater 3 pin on the expansion header?
Is it pin #8 on expansion connector?

@DjDemonD:

If you set S0.03 tolerance and you ask for 5 probes, and it does 5 probes and presumably (I have not seen it fail yet - what is the failure mode if it cannot achieve a consistent reading?) it does not move on then your sensor is not giving you accuracy/repeatability within 30 microns.

You can test it by just homing, moving to bed centre, then sending
G1 Z10
G30
G1 Z10
G30

do this (or make a gcode file with just these commands repeated) 30 times and then get the range (accuracy) and standard deviation (repeatability). I have no problems with 0.03 tolerance using a Piezo20. I have not yet had time to experiment with lower values. Please do keep things in perspective 0.03 is 30 microns (a first layer is often 200 microns). We publish data to suggest 10 microns is achievable, but that requires a well-implemented sensor in a rigid and well-constructed printer.

Im afraid mine giving different results. I will send results later. I think I have complex problem.
HeatBed - not perfectly flat. it going as wave. if sides = 0 middle line +0.8mm
Sometime when bed going up and hit nozzle. Nozzle going little bit up. but not everywhere on plate. usually its random places
I will publish all settings later (when back to home)
And THANK YOU VERY MUCH to everyone who tied and trying to help me!!
By the way how i can get the range (accuracy) and standard deviation (repeatability) after G1Z10 G30? it is specific command?

Thank you! I have missed that parameter and been confused why is not working:)
Is it mean my piezo sensor have tolerance higher than 0.03?

Finally found
M558: Set Z probe type
Switch Annn

How use multi-touch Z probing? what switch I should use?
Can you please help me

Hi.
Can you help me please.
I have problem with z homing.
When i switch on printer and run z home. Z height set to 0. But if after that i run homing or mesh compensstion check i see for example 0.5 or 0.1 ( it random). If i right understand of course after z home it should back to 0.
I have corexy printer with head piezo sensor.

PS thank you in advance and sorry for my brocken English.